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MEĀ 5803. Principles of Microfabrication. (1-6) 3 Credit Hours.

Prerequisite: EGR 3323 or consent of instructor. Photolithography, thin film deposition, doping, wet patterning, plasma etching, thin film characterization. Students will fabricate simple microstructures such as coplanar waveguides, micro-fluidic devices and nano-powder silica films. (Same as EE 5413. Credit cannot be earned for both ME 5803 and EE 5413).