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EEĀ 5503. Introduction to Micro and Nanotechnology. (2-3) 3 Credit Hours.

Prerequisite: Graduate standing or completion of or concurrent enrollment in EE 3323. Survey of micro-fabrication techniques, scaling laws, mechanical, optical and thermal transducers, micro-fluidic applications, nanostructures. (Same as ME 5883. Credit cannot be earned for both EE 5503 and ME 5883).